JPS60205328A - 圧力センサ - Google Patents

圧力センサ

Info

Publication number
JPS60205328A
JPS60205328A JP6418884A JP6418884A JPS60205328A JP S60205328 A JPS60205328 A JP S60205328A JP 6418884 A JP6418884 A JP 6418884A JP 6418884 A JP6418884 A JP 6418884A JP S60205328 A JPS60205328 A JP S60205328A
Authority
JP
Japan
Prior art keywords
pressure
diaphragm
gauge
compensation
recessed part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6418884A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0542611B2 (en]
Inventor
Toshio Aga
阿賀　敏夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp filed Critical Yokogawa Hokushin Electric Corp
Priority to JP6418884A priority Critical patent/JPS60205328A/ja
Publication of JPS60205328A publication Critical patent/JPS60205328A/ja
Publication of JPH0542611B2 publication Critical patent/JPH0542611B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP6418884A 1984-03-30 1984-03-30 圧力センサ Granted JPS60205328A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6418884A JPS60205328A (ja) 1984-03-30 1984-03-30 圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6418884A JPS60205328A (ja) 1984-03-30 1984-03-30 圧力センサ

Publications (2)

Publication Number Publication Date
JPS60205328A true JPS60205328A (ja) 1985-10-16
JPH0542611B2 JPH0542611B2 (en]) 1993-06-29

Family

ID=13250829

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6418884A Granted JPS60205328A (ja) 1984-03-30 1984-03-30 圧力センサ

Country Status (1)

Country Link
JP (1) JPS60205328A (en])

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55106331A (en) * 1979-02-09 1980-08-15 Hitachi Ltd Pressure sensor of semiconductor strain gauge

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55106331A (en) * 1979-02-09 1980-08-15 Hitachi Ltd Pressure sensor of semiconductor strain gauge

Also Published As

Publication number Publication date
JPH0542611B2 (en]) 1993-06-29

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